5-Axis Milled Ceramic Insulators for Semiconductor Lako & Cleanrooms

I loko o ke ao kiʻekiʻe o ka hana semiconductor a me nā lumi lumi maʻemaʻe, pono kēlā me kēia ʻāpana e hoʻopuka i ka hana kīnā ʻole. Ma kaPFT, loea mākou i ka hana lima5-axis milled ceramic insulatorse wehewehe hou i ka pololei a me ka hilinaʻi. Me ka ʻoi aku o 20+mau makahiki o ka ʻike, ua ʻenehana kā mākou mau hoʻonā e hoʻokō i nā koi koʻikoʻi o nā lako semiconductor, e hōʻoia ana i ka paʻa wela, ka insulation uila, a me ka hana ʻole o ka contamination i nā hoʻonohonoho ultra-sensitive.

No ke aha e koho ai i kā mākou 5-Axis Milled Ceramic Insulators?

1.Nā Mana Hana Hana Hou

Ua lako kā mākou hale hananā mīkini wili CNC 5-axis hou loa, hiki i ka micron-level pololei i ka hana ʻana i nā seramika holomua e like me ke alumina (Al₂O₃), silicon carbide (SiC), a me ka alumini nitride (AlN). ʻAʻole like me nā ʻano hana maʻamau, ʻae ʻia ka mīkini 5-axis i nā geometries paʻakikī-koʻikoʻi no nā ʻāpana e like me nā pine wafer lift, nā ʻāpana keʻena deposition, a me nā insulators pale plasma.

Nā mea nui:

•pololei:± 0.005mm ka hoʻomanawanui no ka hoʻohui pono ʻana i nā mea hana lithography ASML a i ʻole nā ​​ʻōnaehana etch Lam Research.
•Maikaʻi Mea:Hoʻopili ʻia no ka 99.8% alumina, SiC maʻemaʻe kiʻekiʻe, a me nā seramika holomua ʻē aʻe.
•Ili Pau:Ra <0.2μm e hōʻemi i ka hoʻokumu ʻana i nā ʻōpala ma nā lumi hoʻomaʻemaʻe ISO Class 1.

2.Hana Hana Pono

Ua hoʻomohala ko mākou mau ʻenekinianā kaʻina hana pani panie hoʻololi ai i ka palupalu o ka seramika i ka wā e hana ʻia ai. Ma ka hoʻohui ʻana i nā ʻenehana wili maloʻo me ka hoʻoheheʻe ʻana i ka manawa maoli, hiki iā mākou ke loaʻa i nā wahi māwae ʻole a me nā mea hoʻolōʻihi i ke ola—ʻoiai ma lalo o ke kaʻa uila wela loa (a hiki i 1,600°C).

ʻO ke kukui hou:

•Nā kuʻina hoʻomaha hoʻomaha:E hōʻemi i nā micro-fractures i nā insulators AlN no nā noi CVD.
•Nā Hana Hana Mahope:Hoʻonui ka HIP (Hot Isostatic Pressing) i ka paʻa a me ka pale ʻana i ka corrosion.

3.ʻO ka hōʻoia ʻana i ka maikaʻi

Loaʻa kēlā me kēia insulator12-pae nānā, me:

•CMM (Mīkini Ana Hoʻohui)hōʻoia o nā ana koʻikoʻi.
•ʻO ka hoʻāʻo ʻana i ka leak heliumno ka launa pū ʻana o ka vacuum.
•EDS (Energy-Dispersive X-ray Spectroscopy)e hōʻoia i ka maʻemaʻe mea.

ʻO kā mākouʻōnaehana hōʻoia ISO 9001/14001e hōʻoia i ka traceability mai ke kūʻai ʻana i nā mea maka (i loaʻa mai nā mea hoʻolako ʻo Tier 1 e like me CoorsTek) i ka ʻeke hope.

Nā noi: Kahi e hui ai ka pololei i ka hana

Ua hilinaʻi ʻia kā mākou insulators:

•Mea Hana Etch & Deposition:ʻO nā mea i uhi ʻia ʻo SiC no ka pale ʻana i ka plasma i nā modules Applied Materials™.
•Nā mea hoʻokomo ion:ʻO nā pine hoʻokiʻekiʻe alumina me nā pale anti-static e pale ai i ka paheʻe ʻana o ka wafer.
•Pūnaehana Metrology:Nā insulators hoʻonui haʻahaʻa wela no nā pae lithography EUV.

Nānā Hiʻohiʻona:ʻO kahi semiconductor OEM alakaʻi i hōʻemi i ka manawa haʻahaʻa o ka mea hana ma 40% ma hope o ka hoʻololi ʻana i kā mākou ʻauʻau SiC i hoʻolālā ʻia, i ʻoi aku ka maikaʻi o nā ʻāpana o nā mea hoʻokūkū ma 300mm wafer processing.

Ma waho aʻe o ka hana ʻana: He ala hoahana

•Hoʻolaha wikiwiki:Hoʻouna i kāu mau faila CAD a loaʻa i nā prototypes hana i nā lā 7.
•Hoʻopili i ka lumi hoʻomaʻemaʻe ma ka pūnaewele:Koho Papa 10 hui lumi hoʻomaʻemaʻe no ka hoʻohui pono ʻana i nā mea hana.
•Kākoʻo ʻenehana olaola:Hāʻawi kā mākou poʻe ʻenekinia i ka nānā ʻana i ka lole a me ka hana hou ʻana i nā lawelawe e hoʻonui i ke ola o nā mea.